MARK E. LAW
Professor and Chair

 

Education:

PhD, EE, Stanford University, 1988
MS, EE, Stanford University, 1982
BS, CprE, Iowa State University, 1981

Contact Information:

Email: law@tec.ufl.edu
Phone: 352-392-0912
Office: 216 Larsen Hall
Homepage: www.tec.ufl.edu/~law

Program Affiliation:

Area:  Devices, Electronics
Lab:   Software and Analysis of Advanced Material Processing Center

Fields of Interest:

• Design and modeling of IC fabrication process
• Computer modeling of semiconductor process and device behavior
• Numerical solution of partial differential equations

Employment:

2003 - Professor and Department Chair, Electrical & Computer Engineering, University of Florida
1997 - Professor, Electrical & Computer Engineering, University of Florida
1993 - Associate Professor, Electrical & Computer Engineering, University of Florida
1988 - Assistant Professor, Electrical & Computer Engineering, University of Florida

Refereed Journals in the Last 3 Years:

2006
Camillo-Castillo, R. A., M. E. Law, K.S. Jones, L.J. Radic, R. Lindsay, S. McCoy, "Kinetics of the End-of-Range Damage Dissolution in Flash-Assist Rapid Thermal Processing." Applied Physics Letters, 88(23), June 5 2006, 232104, 3 pages.

Camillo-Castillo, R. A., M. E. Law, K.S. Jones, R. Lindsay, K. Maex, B.J. Pawlak, S. McCoy, "Application of flash-assist rapid thermal processing subsequent to low-temperature furnace anneals." Journal of Vacuum Science & Technology B 24(1), 2006, 450-455.

2005
Radic, L., A. F. Saavedra, K.S. Jones, M.E. Law, "Modelling of B diffusion in the presence of Ga." Journal of Vacuum Science & Technology B 24(1), 2006, 478-481.
R.T. Crosby, K.S. Jones, M.E. Law, L. Radic, P.E. Thompson, J. Liu, “Dislocation loops in Silicon-Germanium Alloys: The Source of Interstitials,” Applied Physics Letters, 87(19), Nov. 7, 2005, 192911, 3 pages.

A. El Kouche, J. Lin, M.E. Law, S. Kim, B.S. Kim, F. Ren, and S. Pearton, "Remote Sensing System for Hydrogen using GaN Schottky Diodes," Sensors and Actuators B , 105 (2), 2005, p. 329-333

Contracts and Grants:

• AFRL, "GaN Device Reliability"
• Semiconductor Research Corp., "Development and Validation of Process Simulation"
• AFOSR, "Radiation Effects on Devices"

Honors and Awards:

2007 Professional Achievement Citation in Engineering, Iowa State University
2006 Semiconductor Research Corporation Aristotle Award
2004 - Semiconductor Research Corporation Faculty Recognition Award for Student Recruiting
1998 - IEEE Fellow
1997 - UF Research Foundation Faculty Award
1996 - College of Engineering Teacher of the Year
1995 - UF Teaching Improvement Program (TIP) Award
1994 - Outstanding Young Alumnus of Iowa State University
1994 - Iowa State University, College of Engineering, Professional Progress Award
1993 - Semiconductor Research Corporation Teaching Excellence Award
1992 - National Science Foundation Presidential Faculty Fellow
1988 - IBM Young Faculty Deveopment Award

Software Copyrights

"SUPREM-IV" with Stanford University, 1991
"FLOOPS" and "FLOODS", 1996